Fpga-based control of piezoelectric actuators
نویسندگان
چکیده
منابع مشابه
FPGA-Based Control of Piezoelectric Actuators
Abstract: In many industrial applications like semiconductor production and optical inspection systems, the availability of positioning systems capable to follow trajectory paths in the range of several centimetres, featuring at the same time a nanometre-range precision, is demanding. Pure piezoelectric stages and standard positioning systems with motor and spindle are not able to meet such req...
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ژورنال
عنوان ژورنال: Serbian Journal of Electrical Engineering
سال: 2011
ISSN: 1451-4869,2217-7183
DOI: 10.2298/sjee1102181j