Focused Ion Beam-Based Specimen Preparation for Atom Probe Tomography
نویسندگان
چکیده
منابع مشابه
Focused ion beam sample preparation for atom probe tomography
Atom Probe (AP) tomography is maturing into a routine method for the atomic resolution compositional analysis of metals, semiconductors and some polymers. This is often combined with a Transmission Electron Microscope (TEM) analysis of the same region of interest. The Focused Ion Beam (FIB) microscope has evolved as an essential tool for site and orientation specific sample preparation for such...
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ژورنال
عنوان ژورنال: Applied Microscopy
سال: 2016
ISSN: 2287-5123
DOI: 10.9729/am.2016.46.1.14