Flatness Measuring Interferometer with Oblique Illumination
نویسندگان
چکیده
منابع مشابه
Microwave Imaging under Oblique Illumination
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ژورنال
عنوان ژورنال: Journal of the Japan Society of Precision Engineering
سال: 1967
ISSN: 0374-3543
DOI: 10.2493/jjspe1933.33.434