Filtered cathodic arc deposition with ion-species-selective bias
نویسندگان
چکیده
منابع مشابه
Filtered cathodic arc deposition with ion-species-selective bias.
A dual-cathode arc plasma source was combined with a computer-controlled bias amplifier to synchronize substrate bias with the pulsed production of plasma. In this way, bias can be applied in a material-selective way. The principle has been applied to the synthesis of metal-doped diamondlike carbon films, where the bias was applied and adjusted when the carbon plasma was condensing and the subs...
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Amorphous carbon thin films with a wide range of sp fraction from 20 to 90% grown by filtered cathodic arc deposition have been examined by ultraviolet (UV) at 325 nm and visible Raman spectroscopy at 457 nm excitation wavelength. The comprehensive study of behaviour of G, D and T band with sp/sp content has been carried out. The upwards shift of the G peak with sp content was observed for both...
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ژورنال
عنوان ژورنال: Review of Scientific Instruments
سال: 2007
ISSN: 0034-6748,1089-7623
DOI: 10.1063/1.2745229