منابع مشابه
Fast, Self-nulling Spectroscopic Ellipsometer : Instrumentation and Application
The advantages of rapid spectral scanning have been combined with -the inherent accuracy of a compensating ellipsometer operated in the polarizer-compensator-sample-analyzer configuration. Wavelength is varied over the visible-UV ( 3 7 0 7 2 0 nm) at a maximum rate of 114 nm/s by rotating a continuously-variable interference filter. A three-reflection Fresnel rhomb serves as the achromatic quar...
متن کاملRotating analyzer–fixed analyzer ellipsometer based on null type ellipsometer
The theory and design of an inexpensive rotating analyzer unit is presented, which allows a conventional null type ellipsometer to work as rotating analyzer–fixed analyzer automatic ellipsometer, without sacrificing the possibility to work in null mode. The mode switching is performed simply by adding or removing the rotating analyzer from its holder. It is shown that the rotating analyzer phas...
متن کاملEllipsometer nulling: convergence and speed.
The process of nulling in ellipsometry is studied by a graphical presentation using the trajectories of two significant polarization states in the complex plane, (XPC) and (XSA). These states are determined by (1) the polarizer and compensator ((XPC)) and (2) the specimen and the analyzer ((XSA)) in the polarizer-compensator-specimen-analyzer ellipsometer arrangement. As the azimuth angles of t...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Review of Scientific Instruments
سال: 1974
ISSN: 0034-6748,1089-7623
DOI: 10.1063/1.1686739