Fabrication of Relaxer-Based Piezoelectric Energy Harvesters Using a Sacrificial Poly-Si Seeding Layer
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Journal of Electronic Materials
سال: 2014
ISSN: 0361-5235,1543-186X
DOI: 10.1007/s11664-014-3308-x