Fabrication of Nickel Oxide Film Microbolometer Using Amorphous Silicon Sacrificial Layer
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Journal of Sensor Science and Technology
سال: 2015
ISSN: 1225-5475
DOI: 10.5369/jsst.2015.24.6.379