Fabrication of nanoscale gaps in integrated circuits

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Fabrication of nanoscale gaps in integrated circuits

Nanosize objects such as metal clusters present an ideal system for the study of quantum phenomena and for the construction of practical quantum devices. Integrating these small objects in a macroscopic circuit is, however, a difficult task. So far, nanoparticles have been contacted and addressed by highly sophisticated techniques not suitable for large-scale integration in macroscopic circuits...

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ژورنال

عنوان ژورنال: Applied Physics Letters

سال: 2002

ISSN: 0003-6951,1077-3118

DOI: 10.1063/1.1495080