منابع مشابه
Feature-Based 3D Process Planning for MEMS Fabrication
With the rapid growth of MEMS technology and market, computer-aided design and process planning systems are strongly required for an appropriate division of labor between MEMS design and its fabrication. The purpose of this study is to develop a new process planning system for MEMS devices for non-expert MEMS designers. The system can treat a 3D MEMS device model which has complex layered struc...
متن کاملMEMS Fabrication
This summary of selected microelectromechanical systems (MEMS) processes guides the reader through a wide variety of fabrication techniques used to make micromechanical structures. Process flows include wet bulk etching and wafer bonding, surface micromachining, deep trench silicon micromachining, CMOS MEMS, and micromolding.
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The silicon-based MEMS fabrication technology, including bulk micromachining and sacrificial layers technology have been developed and studied. The 3-D fabrication and integration of silicon-based MEMS and standard process fabrication have been studied in the present paper. 1 Introduction MEMS devices and systems offer advantages of small volume, light weight, low power, and the integration of ...
متن کاملDemonstration of a Micro-cpl Based on Mems Fabrication Technologies
Utilizing current Micro Electro Mechanical Systems (MEMS) technologies, a three-port microcapillary pumped loop (micro-CPL) was designed, fabricated and tested to provide integral cooling to electronics or MEMS type devices. The two wafer design consists of one silicon and one borofloat glass wafer. An analytical study was used in determining the geometry of the device, including the evaporator...
متن کاملFabrication Methods for Polymer Mems
Several soft lithography-based polymer microfabrication techniques are described. These processes are capable of producing polymer microstructures from various materials including piezoelectric and conducting polymers. Two of the methods described are also capable of producing freely suspended microstructures, an important step in the implementation of polymers as functional mechanical structur...
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ژورنال
عنوان ژورنال: Current Directions in Biomedical Engineering
سال: 2016
ISSN: 2364-5504
DOI: 10.1515/cdbme-2016-0021