Fabricating three-dimensional polymeric photonic structures by multi-beam interference lithography
نویسندگان
چکیده
منابع مشابه
Fabricating Three-Dimensional Polymeric Photonic Structures by Multi-Beam Interference Lithography
The fabrication of true three-dimensional (3D) microstructures both rapidly and economically over a large area with negligible defects is attractive for a wide range of applications. In particular, multi-beam interference lithography is one of the promising techniques that can mass-produce polymeric 3D photonic crystals defectfree over a large area. This review discusses the relationship betwee...
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Three-beam interference lithography represents a technology capable of producing two-dimensional periodic structures for applications such as micro- and nanoelectronics, photonic crystal devices, metamaterial devices, biomedical structures, and subwavelength optical elements. In the present work, a systematic methodology for implementing optimized three-beam interference lithography is presente...
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We present laser interference patterning of three-dimensional photonic lattice structures with three-step three-beam irradiation. In contrast to one-step four-beam interference patterning, the proposed method makes it possible to continuously tune the lattice constant and the photonic band gap without distortion of the lattice shape. We analytically show that all fourteen Bravais lattices are p...
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We are developing a scanning beam interference lithography (SBIL) system. SBIL is capable of producing large-area linear diffraction gratings that are phase-accurate to the nanometer level. Such gratings may enable new paradigms in fields such as semiconductor pattern placement metrology and grating-based displacement measuring interferometry. With our prototype tool nicknamed “Nanoruler”, I ha...
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2009 WILEY-VCH Verlag Gmb Considerable research has been carried out on photonic crystals since the concept was introduced in 1987. However, fabrication of high-quality 3D photonic crystals still remains a challenge. Among a wide range of proposed techniques, creation of large-area, defect-free 3D polymeric templates through multibeam interference lithography, direct laser writing, or direct in...
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ژورنال
عنوان ژورنال: Polymers for Advanced Technologies
سال: 2006
ISSN: 1042-7147,1099-1581
DOI: 10.1002/pat.663