Excimer laser-induced deposition of copper from Cu(hfac) (TMVS)
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Mechanisms of absorption in pulsed excimer laser-induced plasma
This work investigates the interaction between pulsed excimer laser-induced plasma and an excimer laser beam. The optical transmissivity through the laser-induced plasma and the velocity of the plasma front are measured within the duration of the laser pulse. Based on the measured velocity of the plasma front, an analysis of compressible gas dynamics is used to compute the thermodynamic propert...
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ژورنال
عنوان ژورنال: Applied Surface Science
سال: 1995
ISSN: 0169-4332
DOI: 10.1016/0169-4332(94)00439-0