Evidence of ferroelectric HfO2 phase transformation induced by electric field cycling observed at a macroscopic scale

The phase transformation of ferroelectric (FE) HfO2 induced by electric field cycling was observed at a macroscopic scale using the conventional X-ray diffraction (XRD) technique. We confirmed that increase in switchable polarization (Psw) is result to amount higher symmetric HfO2, both scale. During characterization, we found an anomalous shift difference between in-plane and out-of-plane interplanar spacing every film fabricated. speculate this phenomenon unique may have played important role during waking-up effect FE-HfO2.