Evaluation of the probing profile of scanning force microscopy tips
نویسندگان
چکیده
منابع مشابه
Silicon cantilevers and tips for scanning force microscopy*
Monocrystallme slhcon canttlevers with Integrated sdlcon tips for scannmg force mlcroscopy are fabncated by means of mlcromachmmg techmques Theorettcal conslderatlons mcludmg fimte element modelhng have been carried out m order to find a smtable shape and dlmenslons according to the mechanical requirements Several different cantilever designs have been fabricated a simple beam with various cros...
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ژورنال
عنوان ژورنال: Ultramicroscopy
سال: 1994
ISSN: 0304-3991
DOI: 10.1016/0304-3991(94)90050-7