Electrostatic Feedback Actuation for Enhancing the Dynamic Range of MOEMS Displacement Sensors
نویسندگان
چکیده
منابع مشابه
Design of Electrostatic Actuators for MOEMS Applications
We propose a novel method for pull-in analysis in electrostatic actuation. In this method, pull-in angle can be found once the capacitance of electrodes is calculated as a function of rotation angle. This is based on our theory, which is that the pull-in angle only depends on the capacitance but not on spring constants or applied voltage. The theory is derived analytically and its limit of appl...
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Orly Yadid-Pecht, MEMBER SPIE Ben-Gurion University of the Negev Electrical and Computer Engineering Department P.O. Box 653 Beer-Sheva 84105 Israel E-mail: [email protected] Abstract. The work done to provide image sensors (CCDs and CMOS) with a wide dynamic range is reviewed. The different classes of solutions, which consist of logarithmic sensors, ‘‘clipped’’ sensors, multimode sensors, frequ...
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ژورنال
عنوان ژورنال: Procedia Engineering
سال: 2016
ISSN: 1877-7058
DOI: 10.1016/j.proeng.2016.11.448