Electrophysical characteristics of power MOSFETs additionally implanted with nitrogen ions
نویسندگان
چکیده
The electrical characteristics of power MOSFETs additionally implanted with nitrogen ions have been studied. Ion implantation was carried out through a protective oxide 23 nm thickness energies 20 and 40 keV doses 1 ⋅ 1013‒5 1014 cm–2. Rapid thermal annealing at temperature 900 or 1000 °C for 15 s. It has established that nitridisation the gate dielectric makes it possible to reduce noise leakage currents their dispersion. In direct order heat treatment (first rapid annealing, then removal oxide), samples prepared an additional operation ion implantation, there is increase in threshold voltage compared control samples. capacitance case less than do not cause significant changes maximum value current-voltage slope. At same time, all studied cases, shift slope towards higher voltages. reverse oxide, annealing), are no differences created ones. also does experience changes. shown range from – 0.15 0 V, drain current nitrogen-implanted manufactured using samples, obtained lower Results explained by decrease density surface states Si SiO2 interface MOS-structures treatment.
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ژورنال
عنوان ژورنال: ?????? ???????????? ???????????????? ????????????
سال: 2022
ISSN: ['2520-6508', '2617-3956']
DOI: https://doi.org/10.33581/2520-2243-2022-3-81-92