Electron spin and cyclotron resonance of laser annealed silicon

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Electron spin and cyclotron resonance of laser annealed silicon

EPR and cyclotron resonance investigations have been performed on laser annealed Si wafers, leading to the identification of the [V + Oi]complex in virgin Si and to a donor signal quenching in P-implanted Si. Revue Phys. Appl. 15 (1980) 21-23 JANVIER 1980, PAGE 1 Classification Physics Abstracts 73.20Hb 76.30 79.20Ds Introduction. Laser annealing techniques have been investigated recently for i...

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ژورنال

عنوان ژورنال: Revue de Physique Appliquée

سال: 1980

ISSN: 0035-1687

DOI: 10.1051/rphysap:0198000150102100