Electron interactions with the focused electron beam induced processing (FEBID) precursor tungsten hexachloride
نویسندگان
چکیده
منابع مشابه
Continuum models of focused electron beam induced processing
Focused electron beam induced processing (FEBIP) is a suite of direct-write, high resolution techniques that enable fabrication and editing of nanostructured materials inside scanning electron microscopes and other focused electron beam (FEB) systems. Here we detail continuum techniques that are used to model FEBIP, and release software that can be used to simulate a wide range of processes rep...
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Background: Focused electron beam induced deposition (FEBID) allows for the deposition of free standing material within nanometre sizes. The improvement of the technique needs a combination of new precursors and optimized irradiation strategies to achieve a controlled fragmentation of the precursor for leaving deposited material of desired composition. Here a new class of copper precursors is s...
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Au(I) complexes are studied as precursors for focused electron beam induced processing (FEBIP). FEBIP is an advanced direct-write technique for nanometer-scale chemical synthesis. The stability and volatility of the complexes are characterized to design an improved precursor for pure Au deposition. Aurophilic interactions are found to play a key role. The short lifetime of ClAuCO in vacuum is e...
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We report experimental results on the kinetics of the electron-beam-induced reduction of WO, by in situ high-resolution electron microscopy. Electron-beam irradiation of WO, results in complete reduction to W. The process is surfaceinitiated through desorption of oxygen from the crystal surface, and the subsequent growth of tungsten was found to be a diffusion-controlled process. The damage rat...
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ژورنال
عنوان ژورنال: Rapid Communications in Mass Spectrometry
سال: 2016
ISSN: 0951-4198
DOI: 10.1002/rcm.7542