Electrical Characteristics of Silent Discharges for Rare-Gas Excimer Light
نویسندگان
چکیده
منابع مشابه
Silent discharges for the generation of ultraviolet and vacuum ultraviolet excimer radiation
Excimers, known from electron beam experiments and UV lasers, can also fomi in silent discharges, a discharge type used for large-scale ozone production. In this high pressure non-equilibrium discharge a dielectric barrier leads to the formation of localized short-lived microdischarges. Inside the microdischarge filaments energetic electrons can excite rare gas (RG) atoms which, under appropria...
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ژورنال
عنوان ژورنال: IEEJ Transactions on Fundamentals and Materials
سال: 1997
ISSN: 0385-4205,1347-5533
DOI: 10.1541/ieejfms1990.117.4_419