Effects of GaN channel downscaling in AlGaN–GaN high electron mobility transistor structures grown on AlN bulk substrate
نویسندگان
چکیده
In this work, two series of AlGaN/GaN/AlN high electron mobility transistor (HEMT) heterostructures have been grown by molecular beam epitaxy on AlN bulk substrates. The effects reduction in the GaN channel thickness as well AlGaN barrier and composition structural electrical properties studied. material analysis involved high-resolution x-ray diffraction, atomic force microscopy, cross-sectional transmission microscopy. a first HEMT structures with an aluminum content 30% barrier, downscaling results strain relaxation rate but at expense degradation mean crystal quality noticeable increase sheet resistance. An opposite trend is noticed for three-terminal breakdown voltage transistors, so that trade-off obtained 50 nm width HEMT, which exhibits resistance 1700 Ω/sq. transistors demonstrating up to 1400 V 40 μm gate drain spacing static R = 32 mΩ cm 2 . On other hand, second barriers sub-10 channels perfectly strained carrier densities allowing preserve resistances range 880–1050
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ژورنال
عنوان ژورنال: Journal of Applied Physics
سال: 2023
ISSN: ['1089-7550', '0021-8979', '1520-8850']
DOI: https://doi.org/10.1063/5.0147048