Effect of Residual Stress on Lattice Parameter and Hardness of Titanium Nitride Films Deposited by Reactive HCD Ion Plating
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چکیده
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Hardness and Stress of Amorphous Carbon Films Deposited by Glow Discharge and Ion Beam Assisting Deposition
The hardness and stress of amorphous carbon lms prepared by glow discharge and by ion beam assisting deposition are investigated. Relatively hard and almost stress free amorphous carbon lms were deposited by the glow discharge technique. On the other hand, by using the ion beam assisting deposition, hard lms were also obtained with a stress of the same order of those found in tetrahedral amorph...
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ژورنال
عنوان ژورنال: Journal of the Japan Institute of Metals and Materials
سال: 2001
ISSN: 0021-4876,1880-6880
DOI: 10.2320/jinstmet1952.65.11_972