Dynamics of a parallel-plate electrostatic actuator in viscous dielectric media
نویسندگان
چکیده
منابع مشابه
Dynamics of Polysilicon Parallel-plate Electrostatic Actuators
The response of a polysilicon parallel-plate electrostatic actuator to AC signals at diierent bias voltages has been measured with a laser interferometer. Using microhinges, large plates (with areas from 100m 2 to 0:1mm 2) with long thin support beams (such as 60031:5m 3) are rotated oo the surface of the substrate to form a parallel-plate capacitor. Fabricated structures having 100m gaps can b...
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ژورنال
عنوان ژورنال: Sensors and Actuators A: Physical
سال: 2019
ISSN: 0924-4247
DOI: 10.1016/j.sna.2019.06.005