Dry micro-electro-discharge machining of carbon-nanotube forests using sulphur-hexafluoride
نویسندگان
چکیده
منابع مشابه
Micro-Electro-Discharge Machining Technologies for MEMS
Advances in micromachining techniques have led to the evolution of micro-electromechanical systems (MEMS). These techniques are typically based on semiconductor manufacturing processes, which offer various advantages such as batch manufacturing of miniaturized devices and monolithic integration of microelectronics with the devices. Surface micromachining has been used to construct complex micro...
متن کاملBatch Mode Micromanufacturing Based on Micro Electro-discharge Machining and Micro Ultrasonic Machining for Micro Electro Mechanical Systems (mems)
Metal alloys have material properties that are very appealing for micro electro mechanical systems (MEMS), but present a challenge for process integration within a lithographic manufacturing sequence of the type used in the semiconductor industry. The batch-mode micro electrodischarge machining (μEDM) discussed here uses lithographically-fabricated electrode arrays with high density and high un...
متن کاملIn Situ Micro Gripper Shaping by Electro Discharge Machining
Bio technologies, electronic components, MEMS or watch industry require handling and positioning of ever smaller micro-parts (ten to hundred μm size). Several tools used for such tasks, called micro-grippers have been developed based on different catching and releasing principles. Vacuum grippers are mainly used in the macro world and have been successfully downsized to fulfill micro-world appl...
متن کاملWireless Sensing of Discharge Characteristics for Quality Control in Batch Mode Micro-electro-discharge Machining
Wireless signals are inherently generated during the spark discharges of micro-electro-discharge machining (μEDM). This work harnesses signals between 300-750 MHz for the monitoring of batch mode machining quality. In particular, the wireless spectra are used to sense incipient, debris-dominated machining that can be destructive to both the tool and the workpiece. Planar stainless steel (316L) ...
متن کاملA Model of Micro Electro-Discharge Machining Plasma Discharge in Deionized Water
For successful commercial adaptation of the l-EDM (micro electro-discharge machining) process, there is a need to increase the process efficiency by understanding the process mechanism. This paper presents a model of the plasma discharge phase of a single discharge l-EDM event in deionized water. The plasma discharge is modeled using global model approach in which the plasma is assumed to be sp...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Carbon
سال: 2013
ISSN: 0008-6223
DOI: 10.1016/j.carbon.2012.09.030