Dissipation in Ultrahigh Quality Factor SiN Membrane Resonators
نویسندگان
چکیده
منابع مشابه
Dissipation in ultrahigh quality factor SiN membrane resonators.
We study the mechanical properties of stoichiometric SiN resonators through a combination of spectroscopic and interferometric imaging techniques. At room temperature, we demonstrate ultrahigh quality factors of 5×107 and a f×Q product of 1×1014 Hz. To our knowledge, these correspond to the largest values yet reported for mesoscopic flexural resonators. Through a comprehensive study of the lim...
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ژورنال
عنوان ژورنال: Physical Review Letters
سال: 2014
ISSN: 0031-9007,1079-7114
DOI: 10.1103/physrevlett.112.127201