Direct graphene synthesis on LiNbO₃ substrate by C implantation on Cu covering layer

Abstract We directly synthesized multi-layer graphene with an area of several hundred square microns on the lithium niobate (LN, LiNbO 3 ) substrate by Carbon (C) implantation into copper (Cu)-covered . The energy C ion was optimized per SRIM simulation to ensure that distribution covers Cu/LiNbO interface. established at 55 keV, such formation peaks in respective materials each side diffusion accumulated interface can form a more uniform interface, which is beneficial synthesis graphene. Following annealing process and removal Cu coating, surface identified characterized using Scanning Electron Microscopy (SEM), Energy-Dispersive x-ray Spectroscopy (EDS), Raman spectroscopy, Atomic Force (AFM). This remarkable advancement encourages industrialization direct substrates via implantation.