Diffusion bonding of silicon nitride to titanium
نویسندگان
چکیده
منابع مشابه
Spontaneous direct bonding of thick silicon nitride
Wafers with 1 μm LPCVD silicon-rich nitride layers have been successfully direct bonded to silicon-rich nitride and boron-doped silicon surfaces. A chemical–mechanical polishing treatment was necessary to reduce the surface roughness of the nitride before bonding. The measured surface energies of the room-temperature bond were comparable to values found for Si–Si hydrophilic bonding. A mechanis...
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ژورنال
عنوان ژورنال: British Ceramic Transactions
سال: 2000
ISSN: 0967-9782,1743-2766
DOI: 10.1179/096797800680947