Development of a two-degree-of-freedom vibration generator for fabricating optical microstructure arrays

Optical microstructure arrays on metallic surfaces are drawing ever-increasing attention due to the increasing requirements in optical systems. Although vibration generators developed for generating microarrays with ultra-precision diamond cutting process, systematic research works its mechanical design, working performance simulation, and numerical simulation of has received less attention. In this study, a novel two-degree-of-freedom generator (2DOF-VG) is designed based triangular amplification mechanism. To precisely simulate 2DOF-VG, detailed multi-physics finite element method proposed. Considering three-dimensional geometric shape tool, motion trajectory, elastic recovery workpiece material, algorithm generation then established used predict surface topography arrays. Finally, two types unique fabricated, which demonstrates feasibility flexibility 2DOF-VG.