Development of a quartz tuning-fork-based force sensor for measurements in the tens of nanoNewton force range during nanomanipulation experiments
نویسندگان
چکیده
منابع مشابه
Atomic Force Microscopy Sidewall Imaging with a Quartz Tuning Fork Force Sensor
Sidewall roughness measurement is becoming increasingly important in the micro-electromechanical systems and nanoelectronics devices. Atomic force microscopy (AFM) is an emerging technique for sidewall scanning and roughness measurement due to its high resolution, three-dimensional imaging capability and high accuracy. We report an AFM sidewall imaging method with a quartz tuning fork (QTF) for...
متن کاملForce-gradient-induced mechanical dissipation of quartz tuning fork force sensors used in atomic force microscopy.
We have studied the dynamics of quartz tuning fork resonators used in atomic force microscopy taking into account the mechanical energy dissipation through the attachment of the tuning fork base. We find that the tuning fork resonator quality factor changes even in the case of a purely elastic sensor-sample interaction. This is due to the effective mechanical imbalance of the tuning fork prongs...
متن کاملFast, high-resolution atomic force microscopy using a quartz tuning fork as actuator and sensor
We report a new method of achieving tip–sample distance regulation in an atomic force microscope ~AFM!. A piezoelectric quartz tuning fork serves as both actuator and sensor of tip–sample interactions, allowing tip–sample distance regulation without the use of a diode laser or dither piezo. Such a tuning fork has a high spring constant so a dither amplitude of only 0.1 nm may be used to perform...
متن کاملTuning fork shear-force feedback.
Investigations have been performed on the dynamics of a distance regulation system based on an oscillating probe at resonance. This was examined at a tuning fork shear-force feedback system, which is used as a distance control mechanism in near-field scanning optical microscopy. In this form of microscopy, a tapered optical fiber is attached to the tuning fork and scanned over the sample surfac...
متن کاملCalibration of quartz tuning fork spring constants for non-contact atomic force microscopy: direct mechanical measurements and simulations
Quartz tuning forks are being increasingly employed as sensors in non-contact atomic force microscopy especially in the "qPlus" design. In this study a new and easily applicable setup has been used to determine the static spring constant at several positions along the prong of the tuning fork. The results show a significant deviation from values calculated with the beam formula. In order to und...
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ژورنال
عنوان ژورنال: Review of Scientific Instruments
سال: 2014
ISSN: 0034-6748,1089-7623
DOI: 10.1063/1.4868236