Development of a parallel local oxidation nanolithography instrument
نویسندگان
چکیده
منابع مشابه
Local Oxidation Nanolithography on Metallic Transition Metal Dichalcogenides Surfaces
The integration of atomically-thin layers of two dimensional (2D) materials in nanodevices demands for precise techniques at the nanoscale permitting their local modification, structuration or resettlement. Here, we present the use of Local Oxidation Nanolithography (LON) performed with an Atomic Force Microscope (AFM) for the patterning of nanometric motifs on different metallic Transition Met...
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During the last decades it has become evident that novel lithographic techniques are required in order to fabricate nanosized devices. It has been shown that non-contact AFM is an efficient technique, capable of manufacturing nanometer sized devices on the surface of a silicon wafer. The AFM nanooxidation approach is based on generating a potential difference between a cantilever needle tip and...
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ژورنال
عنوان ژورنال: Review of Scientific Instruments
سال: 2006
ISSN: 0034-6748,1089-7623
DOI: 10.1063/1.2336773