Development of a Compact, Low-Frequency Vibration, Piezoelectric MEMS Energy Harvester
نویسندگان
چکیده
منابع مشابه
Low-Frequency, Low-G MEMS Piezoelectric Energy Harvester
This paper reports the design, modeling and fabrication of a novel MEMS device for low-frequency, low-g vibration energy harvesting. The new design is based on bi-stable buckled beam structure. To implement the design at MEMS scale, we further proposed to employ residual stress in micro-fabricated thin films. With an electromechanical lumped model, the multi-layer beam could be designed to achi...
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ژورنال
عنوان ژورنال: Proceedings
سال: 2017
ISSN: 2504-3900
DOI: 10.3390/proceedings1040588