Design of an Einzel Lens with Square Cross-Section
نویسندگان
چکیده
In this paper, the results of modeling and simulation a microcolumn are presented. The is part developed miniature MEMS electron microscope equipped with high-vacuum micropump. Such an arrangement makes device first stand-alone electron-optical to operate without external chamber. Before such can be fabricated, research on particular elements must carried out determine working principles device. calculations described in article help us understand work square holes electrodes. formation beam spot at anode discussed. Further show dependence Einzel lens size diameter, current, focusing voltage. used define optimal design microscope.
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ژورنال
عنوان ژورنال: Electronics
سال: 2021
ISSN: ['2079-9292']
DOI: https://doi.org/10.3390/electronics10192338