Design, Fabrication, and Characterization of a Micro Coriolis Mass Flow Sensor Driven by PZT Thin Film Actuators

A micro Coriolis flow sensor accurately measures small mass flows without being affected by properties of the fluid. This paper presents a driven PZT thin film piezoelectric actuators, which allows combination large actuation force, low power dissipation and virtually no self-heating. The was fabricated using surface channel technology, resulting in tube diameter 40 $\mu \text{m}$ silicon-rich silicon nitride wall 1.2 thick, with few additional steps to form integrated actuators. actuators can actuate into both swing mode twist mode. Both modes were evaluated for different fluids results are presented this paper. In case actuation, an optical readout used detect movement, relatively sensitivity. capacitive and, comparison previously published devices, high sensitivity achieved thanks optimized design. measurement show read-out noise has standard deviation 0.15% full scale 1.8 gh −1 when actuated [2020-0392]