Defects in Titanium Aluminum Nitride-Based Thin Films
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Linköping studies in science and technology
سال: 2023
ISSN: ['0345-7524']
DOI: https://doi.org/10.3384/9789180750608