Deep plasma etching of Parylene C patterns for biomedical applications
نویسندگان
چکیده
منابع مشابه
Plasma removal of Parylene C
Parylene C, an emerging material in microelectromechanical systems, is of particular interest in biomedical and lab-on-a-chip applications where stable, chemically inert surfaces are desired. Practical implementation of Parylene C as a structural material requires the development of micropatterning techniques for its selective removal. Dry etching methods are currently the most suitable for bat...
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ژورنال
عنوان ژورنال: Microelectronic Engineering
سال: 2017
ISSN: 0167-9317
DOI: 10.1016/j.mee.2017.02.012