Cyclotron resonance in a pure electron plasma column

Cyclotron Waves in a Nonneutral Plasma Column

A kinetic theory of linear electrostatic plasma waves with frequencies near the cyclotron frequency Ωcs of a given plasma species s is developed for a multispecies nonneutral plasma column with general radial density and electric field profiles. Terms in the perturbed distribution function up to O(1/Ωcs) are kept, as are the effects of finite cyclotron radius rc up to O(r 2 c ). At this order t...

Plasma expansion from a dielectric electron cyclotron resonance source

The boundary conditions in an electron cyclotron resonance (ECR) source have been modified to mimic the operating conditions where current-free double-layers (DLs) have been recently measured in rf helicon plasmas. The plasma is heated or generated by the ECR at 875 G inside a dielectric source tube, and expands into a grounded diffusion chamber (terminated by a glass plate) by a rapidly decrea...

TE 01 Excitation of an Electron Cyclotron Resonance Plasma Source

The uniformity of plasma generation in electron cyclotron resonance (ECR) reactors for materials processing, and the subsequent uniformity of fluxes to the substrate, are generally a function of the mode of the microwave radiation injected into the chamber. In this paper, a finite difference time domain (FDTD) simulation is used to demonstrate the consequences of exciting an ECR reactor using a...

Electron Cyclotron Resonance Ion Source

Electron Cyclotron Resonance Ion Source