Coupling compensation for nano raster scanning of piezoelectric nano-stages with delays

Raster-scanning serial protein crystallography using micro- and nano-focused synchrotron beams

High-resolution structural information was obtained from lysozyme microcrystals (20 µm in the largest dimension) using raster-scanning serial protein crystallography on micro- and nano-focused beamlines at the ESRF. Data were collected at room temperature (RT) from crystals sandwiched between two silicon nitride wafers, thereby preventing their drying, while limiting background scattering and s...

Evaluation of Stages of Nano-cmm

The Coordinate Measuring Machines (CMMs) are widely used for the three-dimensional measurements of workpieces. For solving the limits and the drawbacks of the traditional CMMs, we have started developing nano-CMM that measures three dimensional parts in nanometer resolution. In this article, we evaluate the repeatability and the straightness of stages of nano-CMM.

Nano-chemistry and scanning probe nanolithographies.

The development of nanometer-scale lithographies is the focus of an intense research activity because progress on nanotechnology depends on the capability to fabricate, position and interconnect nanometer-scale structures. The unique imaging and manipulation properties of atomic force microscopes have prompted the emergence of several scanning probe-based nanolithographies. In this tutorial rev...

Optimal Design and Control of a z-Tilt Piezoelectric Based Nano-Scale Compensation Stage with Circular Flexure Hinges

The Taguchi method is widely used for the optimization of mechanical design and this study is used it in the design of a 2D circular flexure hinge for a z-tilt piezoelectric based nano-scale compensation stage. Maximum displacement of the stage is 16 μm at z-axis and ±30 arcsec at θx and θy. The most important design parameters for such a flexure hinge are minimal diameter, body height, and not...

Fabrication and Characterization of Nano Probes for Scanning Electrochemical Microscopy