Correlative Optical Spectroscopy and Atom Probe Tomography

Atom probe tomography in nanoelectronics

The role of laser assisted atom probe tomography (APT) in microelectronics is discussed on the basis of various illustrations related to SiGe epitaxial layers, bipolar transistors or MOS nano-devices including gate all around (GAA) devices that were carried out at the Groupe de Physique des Matériaux of Rouen (France). 3D maps as provided by APT reveal the atomic-scale distribution of dopants a...

FIB Preparation of Bone–Implant Interfaces for Correlative On-Axis Rotation Electron Tomography and Atom Probe Tomography

Osseointegration refers to the direct bonding between titanium implants and bone, making it one of the key factors for the success of reconstructive and regenerative orthopaedic and dental surgeries [1]. Resolving the implantbone interface with high chemical or spatial resolution enables a clearer determination of bone growth mechanisms at the implant interface and optimal modification of impl...

Toward atom probe tomography of microelectronic devices

Atom Probe Tomography of Oxide Scales

Atom probe tomography, APT, is the only microstructural method that can routinely analyse and position individual atoms in a material with a spatial resolution of 0.1-0.5 nm. Recent implementation of pulsed-laser to APT made investigation of less conducting materials, such as oxides, feasible. In this paper a short description of the principle of the techniques is presented. It is followed by e...

Dynamic reconstruction for atom probe tomography.

Progress in the reconstruction for atom probe tomography has been limited since the first implementation of the protocol proposed by Bas et al. in 1995. This approach and those subsequently developed assume that the geometric parameters used to build the three-dimensional atom map are constant over the course of an analysis. Here, we test this assumption within the analyses of low-alloyed mater...