Composition and Thickness Uniformity of Chemical Vapor Deposited Barium Strontium Titanate Films on a Patterned Structure
نویسندگان
چکیده
منابع مشابه
Characteristics of the surface layer of barium strontium titanate thin films deposited by laser ablation
Ba0.5Sr0.5TiO3 ~BST! thin films grown on Si by an in situ ultraviolet-assisted pulsed laser deposition ~UVPLD! technique exhibited significantly higher dielectric constant and refractive index values and lower leakage current densities than films grown by conventional PLD under similar conditions. X-ray photoelectron spectroscopy ~XPS! investigations have shown that the surface layer of the gro...
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The functional properties of two types of barium strontium titanate ~BST! thin film capacitor structures were studied: one set of structures was made using pulsed-laser deposition ~PLD! and the other using chemical solution deposition. While initial observations on PLD films looking at the behavior of Tm ~the temperature at which the maximum dielectric constant was observed! and Tc* ~from Curie...
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The role of anisotropic misfit strains on the spontaneous polarization, dielectric properties, and pyroelectric response of 110 oriented Ba0.6Sr0.4TiO3 BST 60/40 thin films on 100 orthorhombic substrates is analyzed theoretically. The anisotropic in-plane strain state and the rotation of the elastic and the electrostrictive constants of the BST 60/40 films result in strongly directional and uni...
متن کاملThe effect of stress on the dielectric properties of barium strontium titanate thin films
Barium strontium titanate thin films are being developed as capacitors in dynamic random access memories. These films, grown on silicon substrates, are under tensile residual stress. By a converse electrostrictive effect, the in-plane tensile stress reduces the capacitance in the thickness direction of the film. We measured the substrate curvature change upon the removal of the film, and found ...
متن کاملAn Investigation of PLD-Deposited Barium Strontium Titanate (BaxSr1-xTiO3) Thin Film Optical Properties
Reflectance and transmittance parameters of pulsed laser deposited barium strontium titanate (BST) were investigated using spectrophotometric methods. Three stoichiometries consisting of BaxSr1−xTiO3 (x = 0.30, 0.40, 0.50) were deposited on glass substrates using oxygen partial pressures of 1.3 Pa ± 0.13 Pa at 500 ̊C. Subsequently, the measured optical parameters were employed to determine the r...
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ژورنال
عنوان ژورنال: Electrochemical and Solid-State Letters
سال: 2001
ISSN: 1099-0062
DOI: 10.1149/1.1344282