Composite Block Polymer−Microfabricated Silicon Nanoporous Membrane

Silicon Solar Cells with Nanoporous Silicon Layer

Ordered arrays of nanoporous silicon nanopillars and silicon nanopillars with nanoporous shells

The fabrication of ordered arrays of nanoporous Si nanopillars with and without nanoporous base and ordered arrays of Si nanopillars with nanoporous shells are presented. The fabrication route is using a combination of substrate conformal imprint lithography and metal-assisted chemical etching. The metal-assisted chemical etching is performed in solutions with different [HF]/[H2O2 + HF] ratios....

Molecular transport through nanoporous silicon nitride membranes produced from self-assembling block copolymers.

To achieve fast and selective molecular filtration, membrane materials must ideally exhibit a thin porous skin and a high density of pores with a narrow size distribution. Here, we report the fabrication of nanoporous silicon nitride membranes (NSiMs) at the full wafer scale using a versatile process combining block copolymer (BCP) self-assembly and conventional photolithography/etching techniq...

Strong anisotropic thermal conductivity of nanoporous silicon

Nanoporous silicon is known to have a thermal conductivity that is orders of magnitude smaller than the bulk crystalline silicon from which it is formed. Even though the strong columnar microscopic structure of porous silicon indicates the possibility of highly anisotropic thermal properties, there have been no measurements. We report here an experimental investigation of this anisotropy. An an...

Effective Optical Properties of Nanoporous Silicon

Nanoporous materials consist of nanosize voids embedded in a solid matrix. The pores can be closed or open and have various shapes and sizes. Their applications range from optical and optoelectronics devices to biosensors. In order to effectively utilize and characterize nanoporous media for these various applications, models that describe their effective optical properties are necessary. Numer...