Coherent Fourier Scatterometry for defect detection on SiC samples

Coherent Fourier Scatterometry (CFS) is a scatterometry technique that has been applied for grating and nanoparticle detection. Here, it challenged to verify the detectability of so-called killer defects on SiC samples power electronic applications. It shown CFS able precisely recognize these regardless their shape or size. could be considered as possible alternative this purpose.