Cleaning Methods for Multilayer Dielectric Pulse Compression Gratings
نویسندگان
چکیده
منابع مشابه
Mixed metal dielectric gratings for pulse compression.
We report on manufacturing and testing results of high efficiency mixed metal dielectric gratings (MMLD) for high power pulse compression applications. The gratings with 1780 l/mm are etched in the top low index layer of a Au-(SiO2/HfO2)4-SiO2 mirror stack. Various grating profiles manufactured in order to modify the near electric field distribution are damage tested on a facility operating at ...
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We report an experimental investigation of high reflection mirrors used to fabricate gratings for pulse compression application at the wavelength of 1.053μm. Two kinds of mirrors are studied: the mixed Metal MultiLayer Dielectric (MMLD) mirrors which combine a gold metal layer with some e-beam evaporated dielectric bilayers on the top and the standard e-beam evaporated MultiLayer Dielectric (ML...
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ژورنال
عنوان ژورنال: Journal of Inorganic Materials
سال: 2019
ISSN: 1000-324X
DOI: 10.15541/jim20190054