Chemical Vapor Deposition of Titanium Disulfide
نویسندگان
چکیده
منابع مشابه
A Review on Titanium Nitride and Titanium Carbide Single and Multilayer Coatings Deposited by Plasma Assisted Chemical Vapor Deposition
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ژورنال
عنوان ژورنال: Bulletin of the Chemical Society of Japan
سال: 1978
ISSN: 0009-2673,1348-0634
DOI: 10.1246/bcsj.51.3240