Characterization of New Particle Formation in Soft X-ray Radiolysis Reactor: AMCs-to-Secondary Inorganic Aerosols

نویسندگان

چکیده

Airborne molecular contaminants (AMCs) in cleanrooms should be monitored and controlled tightly to reduce yield loss since they can converted into nanoparticles or surface haze contamination on semiconductor chips masks. Soft X-ray radiolysis was developed detect AMCs as low the ppt-level by forming secondary aerosols from under soft irradiation. However, new particle formation (NPF) using has not been well investigated. In this study, we have a continuous flow tube reactor understand NPF radiolysis. The designed continuously maintain parabolic laminar flows within extend exposure time of gas molecules X-rays increasing number modules. With increase concentration sulfur dioxide (SO2), size distribution particles formed also showed enhanced subsequent growth. conversion rates SO2 decreased simultaneously. growth were positively affected residence time. emitters, adjusted modules inlet rate. mixture ammonia (NH3) with stabilized nucleation but suppressed contrast, nitrogen (NO2) both SO2. Among parameters for controlling radiolysis, intensity had highest effect inorganic AMCs-to-nanoparticle conversion.

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ژورنال

عنوان ژورنال: Aerosol and Air Quality Research

سال: 2023

ISSN: ['2071-1409', '1680-8584']

DOI: https://doi.org/10.4209/aaqr.220373