Characterization of a 2 MHz-radiofrequency-driven magnetically expanding plasma source

نویسندگان

چکیده

A radio frequency (rf) plasma source is operated at 2 MHz under an expanding magnetic field. The consists of a 14-cm-diameter and 25-cm-long tube wound by seven-turn rf loop antenna powered via impedance matching circuit. efficient power transfer to the demonstrated, high-density above 1012 cm−3 successfully obtained for kW level power. radial density profile having center peak observed both in field; it does not show conical structure previously 13.56 sources. This implies that electron heating layer changed lowering driving frequency. Even MHz, measurement ion energy distribution shows presence supersonic beam as well sources higher frequencies, e.g., previous studies.

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ژورنال

عنوان ژورنال: AIP Advances

سال: 2022

ISSN: ['2158-3226']

DOI: https://doi.org/10.1063/5.0106732