Cathodoluminescence of intrinsic defects in films La : HfZrO

نویسندگان

چکیده

Lanthanum-doped (La:(HfZr)O 2 ) nanometer films of a solid solution hafnium oxide and zirconium are great interest for the development universal memory that combines an unlimited number RAM reprogramming cycles nonvolatile flash memory. This work is devoted to studying cathodoluminescent properties La : HfZrO thin with different contents lanthanum. It shown cathodoluminescence spectra dominated by two emission bands intensity maxima at 2.7 2.2 eV. The blue band energy eV due oxygen vacancy in HfZrO. study influence lanthanum impurity annealing samples argon suggests yellow maximum related divacancy. Keywords: luminescence, oxide, vacancy.

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ژورنال

عنوان ژورنال: Optics and Spectroscopy

سال: 2022

ISSN: ['0030-400X', '1562-6911']

DOI: https://doi.org/10.21883/eos.2022.12.55242.4244-22