Catalytic Decomposition of SF6from Semiconductor Manufacturing Process
نویسندگان
چکیده
منابع مشابه
In-situ Process Control for Semiconductor Manufacturing
There is a critical need for exact, real-time reaction control of the chemical vapor deposition (CVD) systems that are used for semiconductor device manufacture [1]. At present, the development of real-time control for reactions within production-style reactor configurations is hampered by a number of issues: The nature, concentrations and physical distributions of the chemical species within t...
متن کاملTiCl4 Barrier Process Engineering in Semiconductor Manufacturing
Titanium nitride (TiN) not only was utilized in the wear-resistant coatings industry but it was also adopted in barrier processes for semiconductor manufacturing. Barrier processes include the titanium (Ti) and TiN processes, which are commonly used as diffusion barriers in via/contact applications. However, engineers frequently struggle at the via/contact module in the beginning of every techn...
متن کاملProcess Automation in Semiconductor Manufacturing: Issues and Solutions
While the area of process automation in semiconductor manufacturing has many issues in common with process automation and enactment in business processes, the nature of the semiconductor manufacturing process introduces a number of challenging new issues. Among these issues is the need to not only automate the process but also to continuously control and optimize it. Furthermore the semantics o...
متن کاملIntegrated Product and Process Control for Sustainable Semiconductor Manufacturing
Semiconductor fabrication is a manufacturing sequence with hundreds of sophisticated unit operations and it is always challenged by strategy development for ensuring the yield of defect-free products. In this paper, an advanced control strategy through integrating product and process control is established. The proposed multiscale scheme contains three layers for coordinated equipment control, ...
متن کاملnchmarking Semiconductor Manufacturing
We are studying the manufacturing performance of semiconductor wafer fabrication plants in the US, Asia, and Europe. There are great similarities in production equipment, manufacturing processes, and products produced at these plants. Nevertheless, data reported here show that important quantitative measures of productivity vary by factors of 3 to as much as 5 across an international sample of ...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Journal of the Environmental Sciences international
سال: 2013
ISSN: 1225-4517
DOI: 10.5322/jesi.2013.22.8.1019