Carbon elimination from silicon kerf: Thermogravimetric analysis and mechanistic considerations
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چکیده
منابع مشابه
Carbon elimination from silicon kerf: Thermogravimetric analysis and mechanistic considerations
40% of ultrapure silicon is lost as kerf during slicing to produce wafers. Kerf is currently not being recycled due to engineering challenges and costs associated with removing its abundant impurities. Carbon left behind from the lubricant remains as one of the most difficult contaminants to remove in kerf without significant silicon oxidation. The present work enables to better understand the ...
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ژورنال
عنوان ژورنال: Scientific Reports
سال: 2017
ISSN: 2045-2322
DOI: 10.1038/srep40535