Cantilever Type Calorimeter with MEMS Technology(<Special Issue>The 1st Symposium on Micro-Nano Engineering)
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چکیده
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Mems cantilever sensors pdf
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ژورنال
عنوان ژورنال: TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series C
سال: 2010
ISSN: 0387-5024,1884-8354
DOI: 10.1299/kikaic.76.1929