Can a Programmable Phase Plate Serve as an Aberration Corrector in the Transmission Electron Microscope (TEM)?
نویسندگان
چکیده
Current progress in programmable electrostatic phase plates raises questions about their usefulness for specific applications. Here, we explore different designs such with the goal of correcting spherical aberration Transmission Electron Microscope (TEM). We numerically investigate whether a plate could provide down to 1 $\r{A}$ngstr\"om spatial resolution on conventional uncorrected TEM. Different design aspects (fill-factor, pixel pattern, symmetry) were evaluated understand effect electron probe size and current density. Some proposed show ($d_{50}$) 0.66$\r{A}$, proving that it should be possible correct well past 1\AA~ limit using consisting an array shifting elements.
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ژورنال
عنوان ژورنال: Microscopy and Microanalysis
سال: 2023
ISSN: ['1435-8115', '1431-9276']
DOI: https://doi.org/10.1017/s1431927622012260