Bottom-up scalable temporally-shaped femtosecond laser deposition of hierarchical porous carbon for ultrahigh-rate micro-supercapacitor

With the accelerated development of electronic devices, micro-supercapacitors (MSCs), as energy storage devices that can charge and discharge quickly, have attracted considerable attention. To improve rate capability MSCs with consideration density remains a challenge. We demonstrated facile method for preparation thin films through bottom-up femtosecond pulsed laser deposition. The irradiated polyimide film transparent substrate to uniformly sputter electrode material onto lower surface substrate. successfully deposited porous amorphous carbon, graphene, carbon quantum dots controllable properties by temporally shaping laser. resulting MSC exhibited an ultrahigh frequency response good performance at scan rates up 10,000 V s?1. characteristic f0 was high 42,000 Hz, relaxation time constant ?0 0.0238 ms. reached impedance phase angle ?82.6° 120 power more than 30 kW cm?3, 0.068 W h cm?3. This provides novel perspective filters future miniaturized portable devices.