Attainment of extreme high vacuum (10-10Pa) by titanium getter pump.
نویسندگان
چکیده
منابع مشابه
A Road Map to Extreme High Vacuum
Ultimate pressure of a well-designed vacuum system very much depends on pretreatments, processing and procedures [1, 2]. Until now much attention has been paid to minimizing hydrogen outgassing from the vacuum chamber wall materials, however, procedures and processing deserve further scrutiny. For reducing the gas load, high sensitivity helium leak detection techniques with sensitivities better...
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We describe a sputtering system that can deposit composition spreads in an effectively UHV environment but which does not require the high-throughput paradigm to be compromised by a long pump down each time a target is changed. The system deploys four magnetron sputter guns in a cryoshroud (getter sputtering) which allows elements such as Ti and Zr to be deposited with minimal contamination by ...
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ژورنال
عنوان ژورنال: SHINKU
سال: 1988
ISSN: 0559-8516,1880-9413
DOI: 10.3131/jvsj.31.315